مؤتمر
A process-independent run-to-run controller and its application to chemical-mechanical planarization
| العنوان: | A process-independent run-to-run controller and its application to chemical-mechanical planarization |
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| المؤلفون: | Moyne, J.R., Telfeyan, R., Hunvitz, A., Taylor, J. |
| المصدر: | Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop Semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995. :194-200 1995 |
| Relation: | Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780327136 9780780327139 |
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| تدمد: | 10788743 |
| DOI: | 10.1109/ASMC.1995.484370 |