Wafer bonding of Si with dissimilar materials

التفاصيل البيبلوغرافية
العنوان: Wafer bonding of Si with dissimilar materials
المؤلفون: Tong, Q.-Y., Kidao, G., Tan, T.Y., Gosele, U.
المصدر: Proceedings of 4th International Conference on Solid-State and IC Technology Solid-state and integrated circuit technology Solid-State and Integrated Circuit Technology, 1995 4th International Conference on. :524-526 1995
Relation: Proceedings of 4th International Conference on Solid-State and IC Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780330625
9780780330627
DOI:10.1109/ICSICT.1995.503338