Inhibition of neutron irradiation on oxidation stacking faults in the surface of Si wafer

التفاصيل البيبلوغرافية
العنوان: Inhibition of neutron irradiation on oxidation stacking faults in the surface of Si wafer
المؤلفون: Yangxian Li, Yulin Ju, Caichi Liu, Yuesheng Xu, Hongmei Wang, Junzhong Cao
المصدر: Proceedings of 4th International Conference on Solid-State and IC Technology Solid-state and integrated circuit technology Solid-State and Integrated Circuit Technology, 1995 4th International Conference on. :586-588 1995
Relation: Proceedings of 4th International Conference on Solid-State and IC Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780330625
9780780330627
DOI:10.1109/ICSICT.1995.503359