Post-dicing particle control for 3D stacked IC integration flows

التفاصيل البيبلوغرافية
العنوان: Post-dicing particle control for 3D stacked IC integration flows
المؤلفون: Bearda, Twan, Travaly, Youssef, Wostyn, Kurt, Halder, Sandip, Swinnen, Bart, Molders, Thomas, Varghese, Ivin, Cheng, Paul
المصدر: 2009 59th Electronic Components and Technology Conference Electronic Components and Technology Conference, 2009. ECTC 2009. 59th. :1513-1516 May, 2009
Relation: 2009 IEEE 59th Electronic Components and Technology Conference (ECTC 2009)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424444755
9781424444762
تدمد:05695503
23775726
DOI:10.1109/ECTC.2009.5074213