مؤتمر
Single step PVD planarized aluminum interconnect with low-/spl epsiv/ organic ILD for high performance and low cost ULSI
| العنوان: | Single step PVD planarized aluminum interconnect with low-/spl epsiv/ organic ILD for high performance and low cost ULSI |
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| المؤلفون: | Zhao, B., Biberger, A., Hoffman, V., Wang, S.-Q., Vasudev, P.k., Seidel, T.E. |
| المصدر: | 1996 Symposium on VLSI Technology. Digest of Technical Papers VLSI technology VLSI Technology, 1996. Digest of Technical Papers. 1996 Symposium on. :72-73 1996 |
| Relation: | 1996 Symposium on VLSI Technology. Digest of Technical Papers |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078033342X 9780780333420 |
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| DOI: | 10.1109/VLSIT.1996.507797 |