Relation between etch pit pairs and pipeline defects in CMOS device

التفاصيل البيبلوغرافية
العنوان: Relation between etch pit pairs and pipeline defects in CMOS device
المؤلفون: Sik-Han Soh, Lari, J., Hunt, S., Davies, T., Kuo, M.
المصدر: Proceedings of 1995 IEEE International Reliability Physics Symposium Reliability physics Reliability Physics Symposium, 1995. 33rd Annual Proceedings., IEEE International. :244-248 1995
Relation: Proceedings of 1995 IEEE International Reliability Physics Symposium
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:078032031X
9780780320314
DOI:10.1109/RELPHY.1995.513686