مؤتمر
Evaluation of fixed oxide charge and oxide-silicon interface trap densities in low-dose and high-dose SIMOX wafers
| العنوان: | Evaluation of fixed oxide charge and oxide-silicon interface trap densities in low-dose and high-dose SIMOX wafers |
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| المؤلفون: | Masui, S., Nakajima, T., Kawamura, K., Yano, T., Hamaguchi, I., Kajiyama, K., Tachimori, M. |
| المصدر: | Proceedings. IEEE International SOI Conference SOI conference SOI Conference, 1994 Proceedings., 1994 IEEE International. :83-84 1994 |
| Relation: | Proceedings of 1994 IEEE International SOI Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780324064 9780780324060 |
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| DOI: | 10.1109/SOI.1994.514257 |