A VFB tunable Single Metal Single Dielectric approach using As I/I into TiN/HfO2 for 32nm node and beyond

التفاصيل البيبلوغرافية
العنوان: A VFB tunable Single Metal Single Dielectric approach using As I/I into TiN/HfO2 for 32nm node and beyond
المؤلفون: Petry, J., Boccardi, G., Singanamalla, R., Liu, C.S., Xiong, K., Escanes, P., Huguenin, J.-L., Tseng, J., Van Nimwegen, L., Voogt, F., Bulle-Lieuwma, C.W.T., Muller, M.
المصدر: 2009 International Symposium on VLSI Technology, Systems, and Applications VLSI Technology, Systems, and Applications, 2009. VLSI-TSA '09. International Symposium on. :57-58 Apr, 2009
Relation: 2009 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424427840
9781424427857
تدمد:1524766X
DOI:10.1109/VTSA.2009.5159289