Temperature scaling of electromigration threshold product in Cu/low-K interconnects

التفاصيل البيبلوغرافية
العنوان: Temperature scaling of electromigration threshold product in Cu/low-K interconnects
المؤلفون: Petitprez, E., Doyen, L., Ney, D.
المصدر: 2009 IEEE International Reliability Physics Symposium Reliability Physics Symposium, 2009 IEEE International. :865-868 Apr, 2009
Relation: 2009 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424428885
9781424428892
تدمد:15417026
19381891
DOI:10.1109/IRPS.2009.5173368