دورية أكاديمية
Lithography Options for the 32 nm Half Pitch Node and Beyond
| العنوان: | Lithography Options for the 32 nm Half Pitch Node and Beyond |
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| المؤلفون: | Ronse, K., Jansen, P., Gronheid, R., Hendrickx, E., Maenhoudt, M., Wiaux, V., Goethals, A.-M., Jonckheere, R., Vandenberghe, G. |
| المصدر: | IEEE Transactions on Circuits and Systems I: Regular Papers IEEE Trans. Circuits Syst. I Circuits and Systems I: Regular Papers, IEEE Transactions on. 56(8):1884-1891 Aug, 2009 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 15498328 15580806 |
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| DOI: | 10.1109/TCSI.2009.2028417 |