High performance 32nm SOI CMOS with high-k/metal gate and 0.149µm2 SRAM and ultra low-k back end with eleven levels of copper

التفاصيل البيبلوغرافية
العنوان: High performance 32nm SOI CMOS with high-k/metal gate and 0.149µm2 SRAM and ultra low-k back end with eleven levels of copper
المؤلفون: Greene, B., Liang, Q., Amarnath, K., Wang, Y., Schaeffer, J., Cai, M., Liang, Y., Saroop, S., Cheng, J., Rotondaro, A., Han, S.-J., Mo, R., McStay, K., Ku, S., Pal, R., Kumar, M., Dirahoui, B., Yang, B., Tamweber, F., Lee, W.-H., Steigerwalt, M., Weijtmans, H., Holt, J., Black, L., Samavedam, S., Turner, M., Ramani, K., Lee, D., Belyansky, M., Chowdhury, M., Aime, D., Min, B., van Meer, H., Yin, H., Chan, K., Angyal, M., Zaleski, M., Ogunsola, O., Child, C., Zhuang, L., Yan, H., Permanaa, D., Sleight, J., Guo, D., Mittl, S., Ioannou, D., Wu, E., Chudzik, M., Park, D.-G., Brown, D., Luning, S., Mocuta, D., Maciejewski, E., Henson, K., Leobandung, E.
المصدر: 2009 Symposium on VLSI Technology VLSI Technology, 2009 Symposium on. :140-141 Jun, 2009
Relation: 2009 Symposium on VLSI Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424433087
تدمد:07431562
21589682