دورية أكاديمية
Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in $\hbox{Ar/CF}_{4}$ and $\hbox{Ar/CHF}_{3}$ Mixtures
| العنوان: | Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in $\hbox{Ar/CF}_{4}$ and $\hbox{Ar/CHF}_{3}$ Mixtures |
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| المؤلفون: | Rakhimova, T. V., Braginsky, O. V., Klopovskiy, K. S., Kovalev, A. S., Lopaev, D. V., Proshina, O. V., Rakhimov, A. T., Shamiryan, D., Vasilieva, A. N., Voloshin, D. G. |
| المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 37(9):1683-1696 Sep, 2009 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00933813 19399375 |
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| DOI: | 10.1109/TPS.2009.2023849 |