مؤتمر
Materials, device and gate oxide integrity evaluation of SIMOX and bonded SOI wafers
| العنوان: | Materials, device and gate oxide integrity evaluation of SIMOX and bonded SOI wafers |
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| المؤلفون: | Wilson, S.R., Wetteroth, T., Hong, S., Shin, H., Hwang, B.-Y., Racanelli, M., Foerstner, J., Huang, M., Shin, H.C. |
| المصدر: | 1995 IEEE International SOI Conference Proceedings SOI conference SOI Conference, 1995. Proceedings., 1995 IEEE International. :143-145 1995 |
| Relation: | 1995 IEEE International SOI Conference Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780325478 9780780325470 |
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| DOI: | 10.1109/SOI.1995.526501 |