مؤتمر
High-Q, gallium nitride nanowire-ALD composite mechanical resonators
| العنوان: | High-Q, gallium nitride nanowire-ALD composite mechanical resonators |
|---|---|
| المؤلفون: | Montague, J. R., Seghete, D., Bertness, K. A., Sanford, N. A., George, S. A., Bright, V. M., Rogers, C. T. |
| المصدر: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International. :1437-1440 Jun, 2009 |
| Relation: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424441907 9781424441921 9781424441938 |
|---|---|
| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/SENSOR.2009.5285813 |