مؤتمر
High-Q, gallium nitride nanowire-ALD composite mechanical resonators
العنوان: | High-Q, gallium nitride nanowire-ALD composite mechanical resonators |
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المؤلفون: | Montague, J. R., Seghete, D., Bertness, K. A., Sanford, N. A., George, S. A., Bright, V. M., Rogers, C. T. |
المصدر: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International. :1437-1440 Jun, 2009 |
Relation: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781424441907 9781424441921 9781424441938 |
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تدمد: | 2159547X 21641641 |
DOI: | 10.1109/SENSOR.2009.5285813 |