مؤتمر
Silicon cantilever beam micromachining and structure geometry characterization
العنوان: | Silicon cantilever beam micromachining and structure geometry characterization |
---|---|
المؤلفون: | Ionascu, G., Manea, E., Comeaga, C. D., Alexandrescu, N., Cernica, I., Bogatu, L. |
المصدر: | 2009 International Semiconductor Conference Semiconductor Conference, 2009. CAS 2009. International. 1:237-240 Oct, 2009 |
Relation: | 2009 International Semiconductor Conference (CAS 2009) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781424444137 |
---|---|
تدمد: | 1545827X 23770678 |
DOI: | 10.1109/SMICND.2009.5336558 |