مؤتمر
Silicon cantilever beam micromachining and structure geometry characterization
| العنوان: | Silicon cantilever beam micromachining and structure geometry characterization |
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| المؤلفون: | Ionascu, G., Manea, E., Comeaga, C. D., Alexandrescu, N., Cernica, I., Bogatu, L. |
| المصدر: | 2009 International Semiconductor Conference Semiconductor Conference, 2009. CAS 2009. International. 1:237-240 Oct, 2009 |
| Relation: | 2009 International Semiconductor Conference (CAS 2009) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424444137 |
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| تدمد: | 1545827X 23770678 |
| DOI: | 10.1109/SMICND.2009.5336558 |