مؤتمر
Wafer level encapsulation techniques for a MEMS microreactor with integrated heat exchanger
| العنوان: | Wafer level encapsulation techniques for a MEMS microreactor with integrated heat exchanger |
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| المؤلفون: | Santagata, F., Mele, L., Mihailovic, M., Morana, B., Creemer, J.F., Sarro, P.M. |
| المصدر: | 2009 IEEE Sensors Sensors, 2009 IEEE. :799-802 Oct, 2009 |
| Relation: | 2009 IEEE Sensors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424445486 9781424453351 |
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| تدمد: | 19300395 |
| DOI: | 10.1109/ICSENS.2009.5398543 |