Characterization of oxide traps leading to RTN in high-k and metal gate MOSFETs

التفاصيل البيبلوغرافية
العنوان: Characterization of oxide traps leading to RTN in high-k and metal gate MOSFETs
المؤلفون: Sanghoon Lee, Heung-Jae Cho, Younghwan Son, Lee, Dong Seup, Shin, Hyungcheol
المصدر: 2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009
Relation: 2009 IEEE International Electron Devices Meeting (IEDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424456406
9781424456390
9781424456413
تدمد:01631918
2156017X
DOI:10.1109/IEDM.2009.5424227