Surface micromachined scanning mirrors

التفاصيل البيبلوغرافية
العنوان: Surface micromachined scanning mirrors
المؤلفون: Mattsson, Kent Erik
المصدر: ESSDERC '92: 22nd European Solid State Device Research conference Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European. :199-202 Sep, 1992
Relation: Proceedings of the 22nd European Solid State Device Research Conference - ESSDERC '92
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0444894780
9780444894786
DOI:10.1016/0167-9317(92)90422-N