مؤتمر
Formation of SiGe Alloy Layers in SIMOX Substrates by Ge+ Implantation
العنوان: | Formation of SiGe Alloy Layers in SIMOX Substrates by Ge+ Implantation |
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المؤلفون: | Chen, N. X., Gong, L., Schork, R., Yuan, J.M., Ryssel, H. |
المصدر: | ESSDERC '94: 24th European Solid State Device Research Conference Solid State Device Research Conference, 1994. ESSDERC '94. 24th European. :737-740 Sep, 1994 |
Relation: | Proceedings of the 24th European Solid State Device Research Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 2863321579 9782863321577 |
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