Photothermal elastic vibration spectra of SiO2 film on Si

التفاصيل البيبلوغرافية
العنوان: Photothermal elastic vibration spectra of SiO2 film on Si
المؤلفون: Todorovic, D. M., Cretin, B., Song, Y. Q., Jovic, V.
المصدر: 2010 27th International Conference on Microelectronics Proceedings Microelectronics Proceedings (MIEL), 2010 27th International Conference on. :247-250 May, 2010
Relation: 2010 27th International Conference on Microelectronics (MIEL 2010)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424472000
9781424471997
9781424472017
DOI:10.1109/MIEL.2010.5490490