مؤتمر
Photothermal elastic vibration spectra of SiO2 film on Si
العنوان: | Photothermal elastic vibration spectra of SiO2 film on Si |
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المؤلفون: | Todorovic, D. M., Cretin, B., Song, Y. Q., Jovic, V. |
المصدر: | 2010 27th International Conference on Microelectronics Proceedings Microelectronics Proceedings (MIEL), 2010 27th International Conference on. :247-250 May, 2010 |
Relation: | 2010 27th International Conference on Microelectronics (MIEL 2010) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781424472000 9781424471997 9781424472017 |
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DOI: | 10.1109/MIEL.2010.5490490 |