Photothermal elastic vibration spectra of SiO2 film on Si

التفاصيل البيبلوغرافية
العنوان: Photothermal elastic vibration spectra of SiO2 film on Si
المؤلفون: Todorovic, D. M., Cretin, B., Song, Y. Q., Jovic, V.
المصدر: 2010 27th International Conference on Microelectronics Proceedings Microelectronics Proceedings (MIEL), 2010 27th International Conference on. :247-250 May, 2010
Relation: 2010 27th International Conference on Microelectronics (MIEL 2010)
قاعدة البيانات: IEEE Xplore Digital Library