Fabrication of a MEMS deformable mirror for adaptive optics

التفاصيل البيبلوغرافية
العنوان: Fabrication of a MEMS deformable mirror for adaptive optics
المؤلفون: Jie Li, Xiqu Chen
المصدر: 2010 International Conference on Optics, Photonics and Energy Engineering (OPEE) Optics Photonics and Energy Engineering (OPEE), 2010 International Conference on. 1:88-91 May, 2010
Relation: 2010 International Conference on Optics, Photonics and Energy Engineering (OPEE 2010)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424452347
9781424452361
تدمد:21587434
21587442
DOI:10.1109/OPEE.2010.5508098