Manufacturing and testing technology for a silicon piezoresistive microaccelerometer

التفاصيل البيبلوغرافية
العنوان: Manufacturing and testing technology for a silicon piezoresistive microaccelerometer
المؤلفون: Comeaga, C. D., Bogatu, L., Ionascu, G., Alexandrescu, N., Sandu, A., Manea, E.
المصدر: 2010 IEEE International Conference on Automation, Quality and Testing, Robotics (AQTR) Automation Quality and Testing Robotics (AQTR), 2010 IEEE International Conference on. 2:1-6 May, 2010
Relation: 2010 IEEE International Conference on Automation, Quality and Testing, Robotics (AQTR 2010)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424467242
9781424467235
9781424467259
DOI:10.1109/AQTR.2010.5520818