Improved reliability of copper interconnects using alloying

التفاصيل البيبلوغرافية
العنوان: Improved reliability of copper interconnects using alloying
المؤلفون: Gambino, Jeffrey P.
المصدر: 2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the. :1-7 Jul, 2010
Relation: 2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2010)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424455966
9781424455973
9781424455980
تدمد:19461542
19461550
DOI:10.1109/IPFA.2010.5532242