مؤتمر
A novel 0.25 /spl mu/m shallow trench isolation technology
| العنوان: | A novel 0.25 /spl mu/m shallow trench isolation technology |
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| المؤلفون: | Chen, C., Chou, J.W., Lur, W., Sun, S.W. |
| المصدر: | International Electron Devices Meeting. Technical Digest Electron devices Electron Devices Meeting, 1996. IEDM '96., International. :837-840 1996 |
| Relation: | International Electron Devices Meeting. Technical Digest |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780333934 9780780333932 |
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| تدمد: | 01631918 |
| DOI: | 10.1109/IEDM.1996.554110 |