مؤتمر
Millimeter wave technique for non-destructive Si wafer homogeneity characterization
| العنوان: | Millimeter wave technique for non-destructive Si wafer homogeneity characterization |
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| المؤلفون: | Laurinavicius, A., Derkach, V.N., Anbinderis, T. |
| المصدر: | 2010 INTERNATIONAL KHARKOV SYMPOSIUM ON PHYSICS AND ENGINEERING OF MICROWAVES, MILLIMETER AND SUBMILLIMETER WAVES Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW), 2010 International Kharkov Symposium on. :1-4 Jun, 2010 |
| Relation: | 2010 International Kharkov Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424479009 9781424478989 9781424478996 |
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| DOI: | 10.1109/MSMW.2010.5546091 |