Millimeter wave technique for non-destructive Si wafer homogeneity characterization

التفاصيل البيبلوغرافية
العنوان: Millimeter wave technique for non-destructive Si wafer homogeneity characterization
المؤلفون: Laurinavicius, A., Derkach, V.N., Anbinderis, T.
المصدر: 2010 INTERNATIONAL KHARKOV SYMPOSIUM ON PHYSICS AND ENGINEERING OF MICROWAVES, MILLIMETER AND SUBMILLIMETER WAVES Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW), 2010 International Kharkov Symposium on. :1-4 Jun, 2010
Relation: 2010 International Kharkov Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW)
قاعدة البيانات: IEEE Xplore Digital Library