Increased current gain and reduced emitter resistance in F-implanted, low thermal budget polysilicon emitters for SiGe HBTs

التفاصيل البيبلوغرافية
العنوان: Increased current gain and reduced emitter resistance in F-implanted, low thermal budget polysilicon emitters for SiGe HBTs
المؤلفون: Moiseiwitsch, N.E., Schiz, J.F.W., Marsh, C.D., Ashburn, P., Booker, G.R.
المصدر: Proceedings of the 1996 BIPOLAR/BiCMOS Circuits and Technology Meeting Bipolar/BiCMOS circuits and technology Bipolar/BiCMOS Circuits and Technology Meeting, 1996., Proceedings of the 1996. :177-180 1996
Relation: Proceedings of the 1996 BIPOLAR/BiCMOS Circuits and Technology Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780335163
9780780335165
تدمد:10889299
DOI:10.1109/BIPOL.1996.554641