دورية أكاديمية
Adaptive Mahalanobis Distance and $k$ -Nearest Neighbor Rule for Fault Detection in Semiconductor Manufacturing
العنوان: | Adaptive Mahalanobis Distance and $k$ -Nearest Neighbor Rule for Fault Detection in Semiconductor Manufacturing |
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المؤلفون: | Verdier, G., Ferreira, A. |
المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 24(1):59-68 Feb, 2011 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 08946507 15582345 |
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DOI: | 10.1109/TSM.2010.2065531 |