مؤتمر
50 nm thick AlN resonant micro-cantilever for gas sensing application
العنوان: | 50 nm thick AlN resonant micro-cantilever for gas sensing application |
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المؤلفون: | Ivaldi, P., Abergel, J., Arndt, G., Robert, P., Andreucci, P., Blanc, H., Hentz, S., Defay, E. |
المصدر: | 2010 IEEE International Frequency Control Symposium Frequency Control Symposium (FCS), 2010 IEEE International. :81-84 Jun, 2010 |
Relation: | 2010 IEEE International Frequency Control Symposium (FCS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781424463992 9781424464005 9781424464012 |
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تدمد: | 23271914 23271949 10756787 |
DOI: | 10.1109/FREQ.2010.5556370 |