مؤتمر
50 nm thick AlN resonant micro-cantilever for gas sensing application
| العنوان: | 50 nm thick AlN resonant micro-cantilever for gas sensing application |
|---|---|
| المؤلفون: | Ivaldi, P., Abergel, J., Arndt, G., Robert, P., Andreucci, P., Blanc, H., Hentz, S., Defay, E. |
| المصدر: | 2010 IEEE International Frequency Control Symposium Frequency Control Symposium (FCS), 2010 IEEE International. :81-84 Jun, 2010 |
| Relation: | 2010 IEEE International Frequency Control Symposium (FCS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424463992 9781424464005 9781424464012 |
|---|---|
| تدمد: | 23271914 23271949 10756787 |
| DOI: | 10.1109/FREQ.2010.5556370 |