دورية أكاديمية
Mechanical Reliability of a Digital Micromirror With Interdigitated Cantilevers
العنوان: | Mechanical Reliability of a Digital Micromirror With Interdigitated Cantilevers |
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المؤلفون: | Kim, D.-H., Kim, M.-W., Jeon, J.-W., Lim, K. S., Yoon, J.-B. |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 19(5):1197-1206 Oct, 2010 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
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DOI: | 10.1109/JMEMS.2010.2067200 |