دورية أكاديمية
Mechanical Reliability of a Digital Micromirror With Interdigitated Cantilevers
| العنوان: | Mechanical Reliability of a Digital Micromirror With Interdigitated Cantilevers |
|---|---|
| المؤلفون: | Kim, D.-H., Kim, M.-W., Jeon, J.-W., Lim, K. S., Yoon, J.-B. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 19(5):1197-1206 Oct, 2010 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
|---|---|
| DOI: | 10.1109/JMEMS.2010.2067200 |