مؤتمر
Micro scale silicon dioxide gear fabrication by bulk micromachining process
| العنوان: | Micro scale silicon dioxide gear fabrication by bulk micromachining process |
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| المؤلفون: | Um, D., Asiabanpour, B., Foor, D., Kurtz, M., Tellers, M., McGregor, M. T. |
| المصدر: | 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on. :860-864 Jan, 2010 |
| Relation: | 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424465439 9781424465446 9781424465453 |
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| DOI: | 10.1109/NEMS.2010.5592170 |