مؤتمر
Influence of technological parameters on the dynamic behavior of a MEMS accelerometer
| العنوان: | Influence of technological parameters on the dynamic behavior of a MEMS accelerometer |
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| المؤلفون: | Comeaga, C.D., Ionascu, G., Manea, E., Sandu, A., Bogatu, L., Besnea, D. |
| المصدر: | CAS 2010 Proceedings (International Semiconductor Conference) Semiconductor Conference (CAS), 2010 International. 01:243-246 Oct, 2010 |
| Relation: | 2010 International Semiconductor Conference (CAS 2010) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424457830 9781424457823 |
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| تدمد: | 1545827X 23770678 |
| DOI: | 10.1109/SMICND.2010.5650639 |