مؤتمر
TEM/EELS analysis of ultra low-k inter-metal dielectric
| العنوان: | TEM/EELS analysis of ultra low-k inter-metal dielectric |
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| المؤلفون: | Singh, Pradeep K., Zimmerman, S., Schulze, S., Schulz, S., Hietschold, M. |
| المصدر: | 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on. :1015-1017 Nov, 2010 |
| Relation: | 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424457977 9781424458004 9781424457984 |
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| DOI: | 10.1109/ICSICT.2010.5667524 |