مؤتمر
Characterization of ultra-low k porous organosilica thin films
| العنوان: | Characterization of ultra-low k porous organosilica thin films |
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| المؤلفون: | Fu, Shuang, Qian, Ke-Jia, Ding, Shi-Jin, Zhang, Wei, Fan, Zhong-yong |
| المصدر: | 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on. :1033-1035 Nov, 2010 |
| Relation: | 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424457977 9781424458004 9781424457984 |
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| DOI: | 10.1109/ICSICT.2010.5667532 |