مؤتمر
Slip defect generation on GaAs wafers during high temperature process: a thermoelastic study from a crystallographic viewpoint
| العنوان: | Slip defect generation on GaAs wafers during high temperature process: a thermoelastic study from a crystallographic viewpoint |
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| المؤلفون: | Sawada, S., Yoshida, H., Kiyama, M., Mukai, H., Nakai, R., Takebe, T., Tatsumi, M., Kaji, M., Fujita, K. |
| المصدر: | GaAs IC Symposium IEEE Gallium Arsenide Integrated Circuit Symposium. 18th Annual Technical Digest 1996 GaAs IC symposium Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1996. Technical Digest 1996., 18th Annual. :50-53 1996 |
| Relation: | GaAs IC Symposium IEEE Gallium Arsenide Integrated Circuit Symposium. 18th Annual Technical Digest 1996 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078033504X 9780780335042 |
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| تدمد: | 10647775 |
| DOI: | 10.1109/GAAS.1996.567635 |