دورية أكاديمية
Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS
| العنوان: | Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS |
|---|---|
| المؤلفون: | Lapisa, M., Stemme, G., Niklaus, F. |
| المصدر: | IEEE Journal of Selected Topics in Quantum Electronics IEEE J. Select. Topics Quantum Electron. Selected Topics in Quantum Electronics, IEEE Journal of. 17(3):629-644 Jun, 2011 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 1077260X 15584542 |
|---|---|
| DOI: | 10.1109/JSTQE.2010.2093570 |