مؤتمر
Diffusion barrier properties of atomic layer deposited iridium thin films on the Cu/Ir/Si structure
| العنوان: | Diffusion barrier properties of atomic layer deposited iridium thin films on the Cu/Ir/Si structure |
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| المؤلفون: | Yong Hwan Lim, Hana Yoo, Bum Ho Choi, Lee, Jong Ho, Ho-Nyun Lee, Hong Kee Lee |
| المصدر: | 10th IEEE International Conference on Nanotechnology Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on. :594-597 Aug, 2010 |
| Relation: | 2010 IEEE 10th Conference on Nanotechnology (IEEE-NANO) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424470310 9781424470334 9781424470327 |
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| تدمد: | 19449399 19449380 |
| DOI: | 10.1109/NANO.2010.5697930 |