مؤتمر
A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
| العنوان: | A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM |
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| المؤلفون: | Morana, B., Santagata, F., Mele, L., Mihailovic, M., Pandraud, G., Creemer, J.F., Sarro, P.M. |
| المصدر: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :380-383 Jan, 2011 |
| Relation: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424496327 9781424496341 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2011.5734441 |