مؤتمر
Fe-B-Nb-Nd Magnetic metallic glass thin film for MEMS/NEMS structure
| العنوان: | Fe-B-Nb-Nd Magnetic metallic glass thin film for MEMS/NEMS structure |
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| المؤلفون: | Phan, T.A., Lee, S.M., Makino, A., Oguchi, H., Kuwano, H. |
| المصدر: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :428-431 Jan, 2011 |
| Relation: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424496327 9781424496341 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2011.5734453 |