مؤتمر
ALD-metal uncooled bolometer
| العنوان: | ALD-metal uncooled bolometer |
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| المؤلفون: | Yoneoka, S., Liger, M., Yama, G., Schuster, R., Purkl, F., Provine, J, Prinz, F. B., Howe, R. T., Kenny, T. W. |
| المصدر: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :676-679 Jan, 2011 |
| Relation: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424496327 9781424496341 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2011.5734515 |