ALD-metal uncooled bolometer

التفاصيل البيبلوغرافية
العنوان: ALD-metal uncooled bolometer
المؤلفون: Yoneoka, S., Liger, M., Yama, G., Schuster, R., Purkl, F., Provine, J, Prinz, F. B., Howe, R. T., Kenny, T. W.
المصدر: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :676-679 Jan, 2011
Relation: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library