مؤتمر
Nanoelectromechanical relays with decoupled electrode and suspension
| العنوان: | Nanoelectromechanical relays with decoupled electrode and suspension |
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| المؤلفون: | Parsa, R., Shavezipur, M., Lee, W.S., Chong, S., Lee, D., Wong, H.-S. P., Maboudian, R., Howe, R.T. |
| المصدر: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :1361-1364 Jan, 2011 |
| Relation: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424496327 9781424496341 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2011.5734687 |