مؤتمر
A novel pre-clean process of BEOL barrier-seed process to enhance reliability performance of advanced 40nm node
| العنوان: | A novel pre-clean process of BEOL barrier-seed process to enhance reliability performance of advanced 40nm node |
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| المؤلفون: | Chun-Min Cheng, Chi-Mao Hsu, Lin, W. C., Hsin-Fu Huang, Yan-Chun Liu, Kun-Hsien Lin, Jin-Fu Lin, Huang, C. C., Wu, JY |
| المصدر: | 2011 International Reliability Physics Symposium Reliability Physics Symposium (IRPS), 2011 IEEE International. :BD.1.1-BD.1.4 Apr, 2011 |
| Relation: | 2011 IEEE International Reliability Physics Symposium (IRPS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424491117 9781424491131 9781424491124 |
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| تدمد: | 15417026 19381891 |
| DOI: | 10.1109/IRPS.2011.5784552 |