مؤتمر
High aspect ratio etching by infrared laser induced micro bubbles
| العنوان: | High aspect ratio etching by infrared laser induced micro bubbles |
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| المؤلفون: | Ohara, O.J., Nagakubo, M., Kawahara, N., Hattori, T. |
| المصدر: | Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots Micro electro mechanical systems Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on. :175-179 1997 |
| Relation: | Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780337441 9780780337442 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.1997.581796 |