مؤتمر
UV curing and photoresist outgassing in high energy implantation
| العنوان: | UV curing and photoresist outgassing in high energy implantation |
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| المؤلفون: | Jones, M.A., Erokhin, Y., Horsky, T., Insalaco, L., Whiteside, D., Slater, S., Buffat, S., Kickel, B., Parrill, T., Jie Jie Xu |
| المصدر: | Proceedings of 11th International Conference on Ion Implantation Technology Ion implantation technology Ion Implantation Technology. Proceedings of the 11th International Conference on. :182-185 1996 |
| Relation: | Proceedings of 11th International Conference on Ion Implantation Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078033289X 9780780332898 |
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| DOI: | 10.1109/IIT.1996.586179 |