مؤتمر
Fundamental study of atomic layer deposition in and on porous low-k films
| العنوان: | Fundamental study of atomic layer deposition in and on porous low-k films |
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| المؤلفون: | Verdonck, P., Delabie, A., Swerts, J., Farrell, L., Baklanov, M.R., Tielens, H., Van Besien, E., Witters, J., Nyns, L., Van Elshocht, S. |
| المصدر: | 2011 IEEE International Interconnect Technology Conference Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International. :1-3 May, 2011 |
| Relation: | Joint 2011 IEEE International Interconnect Technology Conference (IITC) & 2011 Materials for Advanced Metallization (MAM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457705038 9781457705014 9781457705021 |
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| تدمد: | 2380632X 23806338 |
| DOI: | 10.1109/IITC.2011.5940307 |