مؤتمر
In-process optical characterization method for sub-100-nm nanostructures
| العنوان: | In-process optical characterization method for sub-100-nm nanostructures |
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| المؤلفون: | Kies, S., Shaikh, M. Z., Gregoire, M., Bringewat, T., Simon, S., Tausendfreund, A., Zimmermann, M., Goch, G. |
| المصدر: | 2011 IEEE International Instrumentation and Measurement Technology Conference Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE. :1-4 May, 2011 |
| Relation: | 2011 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424479337 9781424479344 9781424479351 |
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| تدمد: | 10915281 |
| DOI: | 10.1109/IMTC.2011.5944117 |